| 摘要 |
PURPOSE: To reduce the number of parts and to improve working efficiency and reliability by constructing an electric fluid valve on the principle of pressure increase and swelling in a flexible wall. CONSTITUTION: A thin membrane chamber 10 for catching a certain quantity of substance is constructed of a silicone base body 12 and the like. The contents of the thin membrane chamber 10 are heated by means of a resistive pattern 20. A passage for fluid is opened/closed according to the expansion of the thin film chamber 10 due to this heating. In this way, a function as an electric fluid valve is provided. For the resistive pattern 20, a resistance heating element is used, for example. |
