Silicon micro sensor and manufacturing method therefor.

摘要

A silicon micro sensor being comprised of a silicon substrate (2), a support element (6) formed over an etched portion of the silicon substrate and a sensor element (5) formed on the support element wherein the support element has a double layered structure being comprised of a silicon oxide film (3) formed on the silicon substrate using the thermal oxidization method and an aluminum oxide film (4) formed on the silicon oxide film using the sputtering method.