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发明名称
PIEZOELECTRIC ACTUATOR
摘要
申请公布号
JPH01283889(A)
申请公布日期
1989.11.15
申请号
JP19880113077
申请日期
1988.05.10
申请人
TOKYO ELECTRIC CO LTD
发明人
NODA MASAYOSHI
分类号
H01L41/083;H01L41/08
主分类号
H01L41/083
代理机构
代理人
主权项
地址
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