| 摘要 |
PURPOSE:To detect the abnormality of respective parts on the spot and to prevent a processing defect by comparing the reception signals by reception side piezo-electric elements and the reception signals when the respective optical parts are normal. CONSTITUTION:Reference signals are oscillated to previously transmit fine oscillations from respective transmission side piezo-electric elements 7 to the respective mirrors 3, 4, 5 and a lens 6 when there are no abnormalities at all in the mirrors 3, 4, 5 and the lens 6. The reception signals (h) received by the respective reception side piezo-electric elements 8 of this time are read by respective signal receivers 9 and are previously set as reference signals H in a comparator 10. The reference signals are transmitted to the respective mirrors 3, 4, 5 and the lens 6 and the reception signals (h) of this time are read. These signals are compared with the reference signals H in the comparator 10. Abnormality such as generation of an abnormal change in the waveform and amplitude as compared with the signals H or the failure in reception appears in the signal (h) of any part having abnormality such as crack when said abnormality arises in said part. The abnormality of the optical parts is thereby detected and an alarm lamp 11 is lighted. |
