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发明名称
CLEANING DEVICE
摘要
申请公布号
JPH01283835(A)
申请公布日期
1989.11.15
申请号
JP19880113263
申请日期
1988.05.10
申请人
PURETETSUKU:KK
发明人
HARADA YASUYUKI;AMANO YUTAKA;SHIRAI KATSUNORI
分类号
B08B3/12;H01L21/304
主分类号
B08B3/12
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代理人
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