MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19880112438-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01283916(A)	申请公布日期	1989.11.15
申请号	JP19880112438	申请日期	1988.05.11
申请人	HITACHI LTD	发明人	HORIUCHI KATSUTADA;KASHU NOBUYOSHI;IIJIMA SHINPEI;KOBAYASHI TAKASHI
分类号	H01L21/20;H01L21/324	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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