| 摘要 |
<p>PURPOSE:To mount a plurality of wafers to a wafer table without scaling up an XY table by turning the wafer table up to a feeder for the wafers and fixing the wafer table to one table when the wafer table is positioned at the feeder. CONSTITUTION:Wafers 8 are set up on both sides of a wafer table 6. When chips in one wafer 8 are separated completely, a stepping motor 21 for revolution is rotated, and the table 6 is inverted with high accuracy through a pulley 22, a timing belt 23 and a pulley 24, and positioned at a precise angle. When air in the lower chamber 16a of a cylinder 16 is discharged through an introducing pipe 20, a piston 17 lowers a hold-down 14, and the table 6 is pushed by the frictional force of a hold-down rubber 15. Since the hold-down 14 is fitted to an X revolution table 5 in revolution-incapable relationship, the table 6 is fixed at a positioned place in the direction of rotation by the motor 21. Accordingly, a plurality of the wafers 8 are mounted to the table 6.</p> |
