发明名称 Disk carrier
摘要 A disk carrier is comprised of a carrier plate having one or more throughholes at which disks are carried with both surfaces exposed to be processed. Abutting and partially around each of these throughholes is a recess such that not only can a disk be easily positioned at the throughhole without having its surface scratched but also a corner is formed in this recessed region which can serve as an indexing depression. For this purpose, the recess may be fomed with a bottom surface parallel to the surface of the carrier plate and boundary wall in the form of a part of a polygon such that two mutually adjacent straight parts thereof, together with the bottom surface, form a corner which can serve as a reference position easily accessible by a touch sensor.
申请公布号 US4880518(A) 申请公布日期 1989.11.14
申请号 US19890329363 申请日期 1989.03.27
申请人 INTELMATEC CORPORATION 发明人 AKAGAWA, MINORU;NAOI, SATOSHI;FUKUMOTO, HEIJIRO
分类号 G11B23/00;C23C14/50;G11B5/84;G11B7/26 主分类号 G11B23/00
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