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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01282871(A)
申请公布日期
1989.11.14
申请号
JP19880112913
申请日期
1988.05.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
URABE TAKASHI;TAKAHATA OSAMU
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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