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发明名称
MANUFACTURE OF SEMICONDUCTOR PRESSURE TRANSDUCER
摘要
申请公布号
JPH01280363(A)
申请公布日期
1989.11.10
申请号
JP19880111227
申请日期
1988.05.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
ARITA HIDENORI
分类号
G01L9/04;G01L9/00;H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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