| 摘要 |
PURPOSE:To efficiently form a magnetostrictive film on the outside peripheral surface of a rotating shaft with high productivity by inserting a rotating shaft into the position on the central axis inside a cylindrical target and fixing this rotating shaft to the position on the above central axis and then carrying out sputtering while applying an external magnetic field in a direction at a specific angle with respect to the axis of the rotating shaft. CONSTITUTION:A cylindrical target 2 composed of a material having magnetostrictive effects, such as Ni-Fe alloy, is disposed in a vacuum tank (not shown in figure) and connected to an electrode 1. A rotating shaft 5 as the object of coating is inserted into the position on the central axis of the above cylindrical target 2 and fixed to the above position. Further, an inclined and cylindrical magnetic device 4 consisting of a shield 3, a magnet 41, and a yoke 42 is disposed on the outside periphery of the cylindrical target 2. By this magnetic device 4, an external magnetic field is applied in a direction at an angle of 30-60 deg. with respect to the axis of the rotating shaft 5. The electrode 1 is electrified in the above state, by which sputtering is carried out. By this method, the adhesion of the sputter atoms emitted from the target 2 to the unnecessary part other than the rotating shaft is prevented, by which the magnetostrictive film can be formed at high film-forming velocity and also contamination inside the vacuum tank can be reduced. |
