| 摘要 |
PURPOSE:To obtain a stable laser output after a rise of a laser by a method wherein, at the rise of the laser, discharge electric power is supplied to a discharge part from an auxiliary discharge power supply part and, in addition, supplementary discharge electric power is supplied from a main discharge power supply part. CONSTITUTION:In an apparatus which is equipped with a main discharge power supply part 4 and an auxiliary discharge power supply part 5 and with a discharge part 3 for discharge use in order to output a laser beam after receiving a supply of discharge electric power from these power supply parts, discharge electric power Pa is supplied to said discharge part 3 from the auxiliary discharge power supply part 5 at a rise of a laser; in addition, supplementary discharge electric power DELTAP is supplied also from the main discharge power supply part 4. For example, a signal of a discharge electric-power supplementary circuit 19 is given to an inverter circuit 11 for main discharge power supply use of a main discharge power supply circuit 41 after receiving the signal, the inverter circuit 11 for main discharge power supply use controls an ON or OFF operation of a switching element, and controls a supplementary amount DELTAP of discharge electric power to be output from a rectification circuit 13 for main discharge power supply use in such a way that discharge electric power sufficient to ignite a cathode pin 2 is supplied to a discharge part. |
