| 摘要 |
<p>PURPOSE:To permit an electron emitting portion to be formed with good precision at a desired position on a thin film to increase the degree of freedom for element designing and manufacturing process by building up the thin film in sequence on the upper and the lower faces of the stage portion of a substrate so that the stage portion is covered. CONSTITUTION:On a substrate 4, a stage forming material 7 is provided and a thin film 3 is laminated and formed so that the stage portion of the stage forming material 7 is covered. At this time the thin film 3 on the stage portion 6 becomes a portion of an easier foaming than other thin film portions in the treatment of electrification. Then, on both ends of the thin layer 3, a conductive metal is laminated and formed to provide electrodes 1, 2. Additionally, with the treatment of electrification between the electrodes 1, 2, the thin film 3 on the stage portion 6 is subjected to foaming to form an electron emitting portion 5 for obtaining an electron emitting element.</p> |
