LINEARLY STRUCTURED MULTIPLE APERTURE AND BEAM BLANKING ELECTRODES FOR THE PRODUCTION OF A MULTIPLICITY OF INDIVIDUALLY BLANKABLE CORPUSCULAR BEAM PROBES IN A LITHOGRAPHY APPARATUS,申请号DE19863666110-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	LINEARLY STRUCTURED MULTIPLE APERTURE AND BEAM BLANKING ELECTRODES FOR THE PRODUCTION OF A MULTIPLICITY OF INDIVIDUALLY BLANKABLE CORPUSCULAR BEAM PROBES IN A LITHOGRAPHY APPARATUS
摘要
申请公布号	DE3666110(D1)	申请公布日期	1989.11.09
申请号	DE19863666110	申请日期	1986.02.07
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	LISCHKE, BURKHARD, PROF. DR.
分类号	H01J9/14;H01J37/09;H01J37/30;H01J37/317;(IPC1-7):H01J37/09	主分类号	H01J9/14
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Ventilated seat for motor vehicle has at least one ventilated component with cushion and covering, and insert under covering with at least two layers

Installation for identification of occupants detects presence of person in vehicle using control signals detected by signals in foot mat which link to and control restraining means

Fastener for mechanical fastening and electrical contacting of electronic component has carrier element and multitude of fastening elements wherein fastening elements are arranged on carrier element and comprises in each case oblong body

Method for marking of power plugs and mains socket, involves power plug which is placed in mains socket in such way that pole of power plug is connected to current conductor of mains socket

Device for portioning hard products, especially frozen food, comprises a storage surface for the products having a damping cushion with a sleeve containing a damping material

Locking plate for drive door fitting of e.g. window comprises carrier plate and head section led relocatable in its height opposite carrier plate wherein connection of retaining edge with carrier plate has a height adjusting element

Stereo projector for use in projection system, has lenses with deflecting device which is rotatable or pivotable synchronously with horizontal frequency in order to over coat projection surface with lamellar sections

Heat shield for exhaust gas guiding unit of motor vehicle`s internal combustion engine, is formed as single-piece sheet unit, which partially encloses guiding unit in shell form and comprises noise and heat absorbing layer at one side

Linear drive has screw driven slide with coplanar piezoelectric or shape memory drive blocks

Door subassembly for motor vehicle has door body forming outer design surface of motor vehicle whereby guiding means is so constructed that window pane lowers from window opening and is arranged before outer design surface of door body

Composite membrane has pre-crosslinked PVA separation layer for separation of water from mixtures with organic compounds at up to specified temperature, obtained by post-crosslinking without addition of acids

Assembling device for constant-velocity universal joint die, piston, and channel for balls and cage

Pressure piston arrangement has ring-shaped pressure piston which has exterior coat side and cylindrical clearance is provided with internal coat side and first front end is turned away to second front end

Fungicidal mixture used for combating plant pathogenic parasitic fungi, comprises a triazolopyrimidine derivative and diethofencarb in synergistically active amounts

Lubricant (preferably grease) comprises a basic oil, a thickener and an additive (polyamide/imide additive and a metal salt)

Production of honeycomb sealing segments by powder metallurgy injection molding useful for aircraft engine gas turbines and in the consumer goods, automobile

Material composition, useful for the production of molded parts, comprises silicon containing polymer, which is formed by cross-linking silicon containing structures under UV-radiation in a continuous manufacturing method

Level converter for signal processing circuits has amplifier which generates difference signal after comparing potential at output with reference potential on which control signal is dependent

Collimator for vacuum deposition installations comprises a lance tube arranged on the side of a collimator tube facing away from the plasma for closing the opening of the collimator tube

Workpiece e.g. gear, storage device for processing machine, has carriers in storage surface for holding work pieces at distance to each other, and conveyors carrying away workpieces from surface to unloading station