Pulse-generating network for the excitation circuit of gas lasers, especially excimer lasers

摘要

The pulse-generating network is constructed according to the principle of an inversion charge transfer circuit (ICT circuit), and, as saturable inductance, a saturable magnetic inductor or a saturable high-voltage pulse shaper is connected in series with these capacitors in a longtitudinal branch between a second capacitor and a third stripline capacitor. The saturable inductance (Ls) is integrated in the three-dimensional capacitor arrangement which preferably has a liquid dielectric. Viewed in the plate direction of the stripline capacitors, this inductance is mechanically and electrically inserted in the form of a stripline capacitor (C3) with extent (B) between a first solid-state capacitor or plate stack (C1/C2<*>) with extent (A) for the first and second capacitors, and a second plate stack (C3<*>) with extent C, for the third capacitor. The laser cavity (LK) is connected to the outer side of the second plate stack (C3<*>). <IMAGE>