发明名称 UNINTERRUPTIBLE POWER SOURCE FOR APPARATUS FOR MANUFACTURE OF SEMICONDUCTOR
摘要 PURPOSE:To effectively supply a predetermined power to a secondary side by comparing an output voltage with a preset value, and generating an alarm when the voltage is the set value or less. CONSTITUTION:A voltage comparator 3 compares a voltage from an external power source 6 with the voltage of a power source 2, supplies the output voltage of a high voltage side to a secondary side while monitoring it, and always holds a predetermined secondary side voltage even at the time of the momentary stop of the power source 6. When the power source 6 is interrupted due to a power interruption, the power source is switched to the internal power source 2 and supplied to the secondary side. When the secondary side load is increased due to the voltage drop of the power source 2 or any cause so that the drop of the secondary side voltage from the set value is detected, a signal is fed to an alarm driver 5. Thus, the driver 5 is operated, an alarm lamp 8 is lit, and an alarm unit 7 generates an alarm of voice.
申请公布号 JPH01278240(A) 申请公布日期 1989.11.08
申请号 JP19880106800 申请日期 1988.04.28
申请人 TOKYO ELECTRON LTD 发明人 YAMAGUCHI TOMOHIKO
分类号 H02J9/00;G05F1/10 主分类号 H02J9/00
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