| 摘要 |
PURPOSE:To improve the matching property in respect to the ion mutual diffusion, the thermal expansion, etc., by a method wherein a specific oxide superconductor wiring material is provided with the same components but in a different composition. CONSTITUTION:An oxide superconductor wiring material represented by a formula I is provided with the same components but in a different composition. In formula I, R represents at least one element out of Sc, Y, La and lanthanide series, X represents at least one element out of IIa group in the periodic table, Z represents at least one element out of transition metallic elements, and D represents at least one element out of group VIa. Furthermore, the three dimensional wiring is composed of a substrate material 1, through hole connecting parts 2, conductor materials 3, insulation parts 4, protective film 5 and connecting terminals 6. As for the substrate 1 and the insulating parts 4 for the oxide superconductor wiring, Y2BaCuO5 which is in the same components but the different compositions from those of a superconductor YBa2Cu3O7-delta is applicable. Through these procedures, the matching property in respect to the ion material diffusion, the thermal expansion, etc., can be improved. |
