| 摘要 |
PURPOSE:To measure the two-dimensional element distribution of a specimen and the distribution of a local structure, by utilizing such a characteristic that the two-dimensional analysis of the surface of the specimen can be performed by taking the X-ray fluoroscopic image of the specimen. CONSTITUTION:The X-rays emitted from an X-ray source X are spectrally defracted by an X-ray spectroscope M and the monochromatic X-rays emitted from the spectroscope M are allowed to irradiate a specimen S. The transmitted X-rays from the specimen S are imaged by the two-dimensional X-ray imaging apparatus B placed behind the specimen S. The image signal taken out of the apparatus B is subjected to A/D conversion by an A/D converter AD1 to be taken in a central processing unit (CPU) 1. The output of a monitor X-ray detector 3 is also subjected to A/D conversion by an A/D converter AD 2 to be taken in the CPU 1. The CPU 1 performs operation to store the obtained data in the area for one frame in a memory 4. The data of the absorptivity corresponding to one arbitrary point on the specimen S is read from the stored data and displayed so as to be arranged in the order of the wavelength of X-rays. Whereupon, the absorption curve relating to the indicated to the indicated point on the specimen S is displayed. By this method, the two-dimensional element distribution of the specimen S and the distribution of a local structure are measured. |
