| 摘要 |
PURPOSE:To form a guard ring having a necessary and sufficient area, and maintain the effective area of a Schottky diode by patterning a channel stopper and the effective area of Schottky diode by using the same mask. CONSTITUTION:The introduction of impurity for forming the active region of a charge coupled element 7 and that for forming a guard ring 6 of a Schottky diode are simultaneously performed by using the same pattern 3, 3'. After that, a nitride film 3' at the central part of the Schottky diode is eliminated and thermally oxidized. Thereby, superfluous alignment margin for forming the effective light receiving region of the Schottky diode is not necessary to be considered, so that the guard ring 6 having a necessary and sufficient area is designed and manufactured, and the large effective light receiving region of the Schottky diode can be maintained. |
