发明名称 |
PROCESS AND APPARATUS FOR PLASMA TREATMENT OF SEMICONDUCTOR MATERIALS |
摘要 |
<p>1. Process for treating a semiconductor material, consisting in placing the material (8) in an electrically insulating enclosure (2) and subjecting it, in the enclosure, to a plasma of a gaseous compound which is appropriate to the treatment, this plasma being obtained by the action of a uniform magnetic field (BO ) in the enclosure (2) and of a radio-frequency electromagnetic field which is produced in the enclosure (2), in the region of action of the uniform magnetic field, and whose magnetic component (BT ) is perpendicular to the uniform magnetic field, the two fields (BO , BT ) being produced by means external to this enclosure.</p> |
申请公布号 |
EP0146446(B1) |
申请公布日期 |
1989.11.08 |
申请号 |
EP19840402320 |
申请日期 |
1984.11.14 |
申请人 |
ETAT FRANCAIS REPRESENTE PAR LE MINISTRE DES PTT (CENTRE NATIONAL D'ETUDES DES TELECOMMUNICATIONS);CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
BOUCHOULE, ANDRE;RANSON, PIERRE;HENRY, DANIEL |
分类号 |
H01J37/32;H01L21/205;H01L21/3065;H01L21/3213 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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