PATTERN MASKING METHOD AND AN APPARATUS THEREFOR,申请号EP19860113698-传众专利搜索

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发明名称	PATTERN MASKING METHOD AND AN APPARATUS THEREFOR
摘要
申请公布号	EP0217414(A3)	申请公布日期	1989.11.08
申请号	EP19860113698	申请日期	1986.10.03
申请人	DAINIPPON SCREEN MFG. CO., LTD.	发明人	HOKI, TETSUO DAINIPPON SCREEN MFG. CO., LTD.;SANO, TETSUO DAINIPPON SCREEN MFG. CO., LTD.;KITAKADO, RYUJI DAINIPPON SCREEN MFG. CO., LTD.;SEZAKI, YOSHINORI DAINIPPON SCREEN MFG. CO., LTD.;HOTTA, TOMIJI DAINIPPON SCREEN MFG. CO., LTD.;YANO, HIRONOBU DAINIPPON SCREEN MFG. CO., LTD.
分类号	G01N21/956;G06T7/00;(IPC1-7):G01N21/88;G01B11/24	主分类号	G01N21/956
代理机构		代理人
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