摘要 |
<p>PURPOSE:To obtain an electron emitting element with high quality and stable characteristic by providing a pair of electrodes facing each other with electrode space at a step portion including particles and applying voltage to the space. CONSTITUTION:Provided on a substrate 3 is an insulative layer where particles 4 are dispersed. A step portion 6 is formed between the end portion of the insulative layer and the upper face of the step portion 6. The electrodes 1 and 2 are provided on the upper surfaces of the insulative layer and the substrate 3, respectively. One end portion of each of the electrodes 1 and 2 are situated on the step portion 6 at the upper or lower ends so as not to hide a portion of the side wall of the step portion 6 at the end portion of the insulative layer where the particles 4 are dispersed. Furthermore, an electrode space 7 is formed between the end portions of the electrodes 1 and 2. Then, electrons are emitted by applying voltage between the electrodes 1 and 2. Thus, the space 7 of the pair of electrodes 1 and 2 facing each other at the step portion 6 corresponds to the crack of a conventional element and the particles correspond to an island. Further, location, shape and size of the electrode space and particle diameter and dispersion state are controlled. Therefore, an electron emitting element with high quality and stable characteristic is obtained.</p> |