| 摘要 |
PURPOSE:To improve electrophotographic characteristics such as surface potential and photosensitivity by substantially consisting the photosensitive body of a photoconductive a-SiC layer and incorporating a group IIIa element, carbon and oxygen in a prescribed range into said layer. CONSTITUTION:The photoconductive a-SiC layer 5 is formed on a conductive substrate 1. The layer 5 consists of a 1st layer region 5a, 2nd layer region 5b, 3rd layer region 5c, and 4th layer region 5d corresponded to the contents of the group IIIa element or carbon. The carbon is incorporated in the 3rd layer region 5c at the ratio higher than in the 2nd layer region 5b and in the 4th layer region 5d at the ratio higher than in the 3rd layer region 5c and the group IIIa element is incorporated at 0-1,000ppm into the 2nd layer region 5b and is incorporated therein at the ratio smaller than in the 1st layer region 5a. Further, the oxygen is incorporated at 5X10<-5>-1atomic% into at least one layer region of the 2nd layer region 5b and the 3rd layer region 5c. The electrophotographic characteristics such as surface potential and photosensitivity are thereby improved. |
