| 摘要 |
<p>PURPOSE:To obtain an inclination angle sensor of non-contact, and also, having high stability by detecting an inclination angle of an electrode side by utilizing a fact that a signal is varied by following up a movement of an electrode corresponding to a signal detector in a hemispherical electrode. CONSTITUTION:A detecting part is formed by two groups of plural electrodes 6..., 7... provided in the direction for intersecting at a prescribed interval on a hemispherical substrate 3, and a signal detector 1 having its rotation center in the center of the substrate 3. A decoder 8 and 9 are controlled by a control circuit 13 and a scanning pulse is applied alternately and successively to 6 and 7, and from the nearest electrodes 6, 7 to a detecting part 4 of the detector 1, the scanning pulse is applied to an amplifier 10 through the part 4. When the amplified pulse has exceeded a set reference potential, a comparator 11 applies it as a digital signal to an arithmetic circuit 12. The circuit 12 detects in which position of the substrate 3 the detector 1 is, that is, an inclination in the X and the Y directions of the detector 1 by comparing an address of the pulse which has been sent out to the decoder 8 or 9 from the circuit 13 and the pulse which has been received from the comparator 11.</p> |
