| 摘要 |
PURPOSE:To quickly and accurately read operating condition by checking a level of pad formed at each measuring point of semiconductor element through a contact hole using a strobo scanning type electronic microscope. CONSTITUTION:A contact holes 43 are formed at the measuring points a-g of a chip 31 forming a phosphorus glass film 42 on the electrodes 41 and pads (flags) 44 are formed through the holes 43. According to observation of a chip 31 forming flags 44 with a strobo scanning type electro microscope, at the timing A the measuring points a-g are respectively level ''1'' (black) or ''0'' (white). Thus, observations are carried out at the timings B-H and changes of logical levels at the measuring points a-g are confirmed on the basis of the timing chart. Thereby, it can be confirmed whether logical changes on the chip 31 are normal or not. |
