| 摘要 |
<p>PURPOSE:To prevent the critical temp. of a high temp. ceramic superconductor used for a semiconductor device, etc., from being made unstable by forming a film of an electrically conductive nitride such as TiN on the surface of the superconductor such as Y1Ba2Cu3O7. CONSTITUTION:A coating layer of an electrically conductive nitride such as TiN, NbN, WN, MoN or ZrN is formed by sputtering or other method on the surface of a high temp. ceramic superconductor such as Y1Ba2Cu3O7 for a core wire. When the superconductor is applied to wiring in a semiconductor device, at least one principal face of the wiring is coated with the nitride. Oxygen ions may be implanted into the superconductor through the coating layer with a high energy ion implating device to form a layer contg. implanted oxygen ions as required.</p> |
