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发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPH01275756(A)
申请公布日期
1989.11.06
申请号
JP19880104904
申请日期
1988.04.26
申请人
FUJITSU LTD
发明人
WAKAMATSU HIROAKI
分类号
C23C14/36;C23C14/35
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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