| 摘要 |
PURPOSE:To simplify the structure of an X-ray source, and to enable uniform pre-ionization by disposing the X-ray source to the central axis, a laser beam axis, of a discharge space formed by both main electrodes so that the X-ray outgoing axis is shaped at an acute angle. CONSTITUTION:A pulse laser oscillator 1 is constituted so that the X-ray outgoing axes of X-ray sources 2, 3 to the optical axis of the oscillator 1 are formed at an acute angle and the sources 2, 3 are arranged on both sides of a main discharge space. When capacitors 6 for the X-ray sources 2 and 3 are charged previously at high voltage and switches 7 are closed, high voltage is applied between a cathode 4 and an anode 5, and X-rays 16, 17 are generated. The X-rays 16, 17 are applied au fixed angles in the direction of the optical axis of the discharge space formed by main electrodes 10, 11 without being transmitted through a total reflection mirror 13 and a partial transmission mirror 14 for the pulse laser oscillator 1, thus pre-ionizing a laser gas. When pulse voltage is applied between the main electrodes 10, 11 from a high-speed high-voltage pulse power not shown at that time, glow discharge 12 is ignited and the laser gas is excited, and laser beams 15 are emitted from the total reflection mirror 13 and the partial transmission mirror 14. |
