| 摘要 |
A transducer for acceleration measurement is fabricated from a silicon wafer and comprises three filaments (3, 4) and (5) which interconnect a support (1) with an inertial mass (2). The filaments act as hinges permitting movement of the inertial mass with respect to the support. The inertia of the mass (2), coupled with an acceleration of the support (1) in the z direction, gives rise to a compression of the filament (3) and an extension of the filaments (4) and (5). The outputs from sensing means responsive to changes in tension incorporated in the filaments (3) and (4) are differenced to give a signal related to applied acceleration. In one embodiment, the filaments are caused to vibrate by means of one of a pair of implanted heating resistors and their resonant frequencies are determined by any external forces applied thereto. The second resistor of the pair is used to detect the vibrations and both resistors form part of a closed-loop electrical circuit. |
