| 摘要 |
<p>PURPOSE:To obtain O2 of high purity in high yield by using feed gas consisting of >=80vol.% O2 and Ar and N2 and connecting each outlet side of waste gas of an adsorption tank having completed O2 adsorption operation an adsorption tank having completed O2 desorption operation, with each other. CONSTITUTION:Feed gas consisting of >=80vol.% O2 and residual vol.% Ar and N2 is fed to an adsorption tank 1 and O2 is adsorbed by molecular sieve carbon, and unadsorbed component is discharged out of the system through a recovering tank 4. On one hand, an adsorption tank 2 is evacuated with a vacuum pump 15, thus adsorbed O2 is desorbed and stored in a product tank 3. Thereafter, the adsorption tanks 1, 2 having completed adsorption and adsorption operation are connected through a valve 13, and remaining gas in the adsorption tank 1 is fed to the adsorption tank 2, and the purity and the yield of recovered O2 are increased.</p> |
