| 摘要 |
PURPOSE:To surely enhance the straightness at the cut-off surface of a workpiece up to the desired accuracy by a method wherein a proper measure for shifting the workpiece in response to the deflection of a blade is devised during the slicing of the workpiece. CONSTITUTION:The amount of deflection of a blade 10 due to cutting resistance during slicing is detected with a first and a second magnetic sensors 31 and 32, which are respectively provided near both the sides of the blade 10. The detected values are subtracted from each other at a subtracter 33 so as to be outputted to a calibrating apparatus 34, a reference displacement storage device 35 and an operational amplifier 36. A transmission coefficient K is determined at the calibrating apparatus 34 on the relationship correlated with the rotational frequency of a third driving motor 20 so as to calculate the variation of the rotational frequency, which is necessary for nullifying the deviation, on the basis of the transmission coefficient K at an arithmetic unit 37 in order to output the calculated correcting rotational frequency to a third driving motor control device 38 for controlling the rotational driving of the third driving motor 20. Thus, the straightness at the cut-off surface of a silicon ingot W can be surely enhanced to the desired accuracy. |
