发明名称 |
ELECTROSTATIC CHUCK |
摘要 |
<p>An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the exposed surfaces of the support body except a portion thereof over which the work is placed. This chuck can not only prevent impure matters from generating from the surfaces of the support body but also prevent damages due to heat.</p> |
申请公布号 |
EP0171011(B1) |
申请公布日期 |
1989.11.02 |
申请号 |
EP19850109514 |
申请日期 |
1985.07.29 |
申请人 |
KABUSHIKI KAISHA TOKUDA SEISAKUSHO |
发明人 |
OOSHIO, HIROSUKE C/O K. K. TOKUDA SEISAKUSHO;WATANABE, OSAMU C/O K. K. TOKUDA SEISAKUSHO |
分类号 |
B23Q3/15;H01L21/683;(IPC1-7):H01L21/68;H02N13/00;H01L21/00 |
主分类号 |
B23Q3/15 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|