发明名称 HIGH MOBILITY TRANSISTOR WITH OPPOSED GATES
摘要 Horizontal and vertical transistors, such as, HEMT/SDHT devices are described with opposed gates for preventing substrate leakage current along with the methods for making same. Also a process for making single gate angled V-HEMT devices is described.
申请公布号 WO8907341(A3) 申请公布日期 1989.11.02
申请号 WO1989US00283 申请日期 1989.01.23
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 HOLLIS, MARK, A.;GOODHUE, WILLIAM, D.;NICHOLS, KIRBY, B.;BERGERON, NORMAND, J., JR.
分类号 C23C14/22;H01L21/285;H01L21/335;H01L21/338;H01L29/06;H01L29/10;H01L29/423;H01L29/778;H01L29/812 主分类号 C23C14/22
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