PROCESS FOR THE PLASMA-ACTIVATED REACTIVE DEPOSITION OF A MULTI-COMPONENT CONDUCTIVE MATERIAL FROM A GAS PHASE,申请号EP19890200038-传众专利搜索

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发明名称	PROCESS FOR THE PLASMA-ACTIVATED REACTIVE DEPOSITION OF A MULTI-COMPONENT CONDUCTIVE MATERIAL FROM A GAS PHASE
摘要
申请公布号	EP0324523(A3)	申请公布日期	1989.11.02
申请号	EP19890200038	申请日期	1989.01.09
申请人	PHILIPS PATENTVERWALTUNG GMBH;N.V. PHILIPS' GLOEILAMPENFABRIEKEN	发明人	GARTNER, GEORG, DR.;JANIEL, PETER;LYDTIN, HANS, DR.
分类号	C23C16/06;C23C16/08;C23C16/18;C23C16/50;C23C16/509;C23C16/52;(IPC1-7):C23C16/50;C23C16/30	主分类号	C23C16/06
代理机构		代理人
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地址

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