发明名称 PROCESS FOR PRODUCING THIN FILM OF METAL SULFIDE
摘要 A process for producing a uniform, dense, thin film of a metal sulfide having excellent electric properties which comprises spraying an organic compound containing at least one metal-sulfur bond in its structure independently or in a state of being dissolved in a solvent as fine powdery mist over a heated base plate.
申请公布号 WO8910326(A1) 申请公布日期 1989.11.02
申请号 WO1989JP00419 申请日期 1989.04.19
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 HASEGAWA, YO;OKANO, KAZUYUKI;ISOZAKI, YASUHITO;TABATA, MUNEHIRO;HAYASHI, CHIHARU;NAKANISHI, AKIRA
分类号 C03C17/22;C23C18/02;C23C18/12;(IPC1-7):C01B17/20 主分类号 C03C17/22
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