| 摘要 |
A package for photoresist material, particularly a dry resist, is substantially impermeable to water vapor, thereby preventing humidity-related effects which adversely influence the processability of the photoresist. The package can comprise a film tubing, the ends of which are closed by welding or gluing, into which a photoresist roll is placed. As the material for the film tubing, a composite material can be used which is formed of a polyester film as the support film, to which an aluminum foil is laminated or which is vacuum-metallized with aluminum and a polyethylene film laminated on top. A tinplate container can also be used as a package, the container being closed by soldering after placing the photoresist material inside the container. These packages generally have a permeability to water vapor of less than 0.01 gram of water vapor per square meter per day, at a humidity gradient of 97% and an ambient temperature of 23 DEG C. |
