| 摘要 |
PURPOSE:To support wafers in a case securely and to protect the wafers from contamination and breakdown, by a constitution which is formed with a case, a basket and a lid and wherein the upper surface and the bottom surface are opened, a plurality of separately provided ribs are formed on the inner surface of the side walls in a facing pattern, and flexible supporting mechanisms are provided in gaps between the separately provided ribs at the end parts of the side walls at the bottom surface side in a discontinuous pattern. CONSTITUTION:A basket 2 supporting wafers is guided with guiding parts 11 and placed in a case 1. A lid 4 is mounted. Engaging projections 43 and 44 are engaged with engaging recess parts 12 and 13. Thus, the basket 2 is fixed with the guiding parts 11 in the case 1 and a pushing tool 41 in the lid 4. The wafer W is fixed with flexible supporting mechanisms 28 and 29 and a wafer pushing part 42 in the lid 4 in the up and down direction. The flexible supporting mechanisms 28 and 29 are provided at the end parts of side walls 22 and 23 at the side of the bottom surface in a discontinuous pattern. Since each wafer W is individually supported, the effect of a vacant place does not affect the wafer even if the vacant place where the wafer W is not inserted is formed. |
