| 发明名称 |
Impurity measuring method and apparatus. |
| 摘要 |
<p>A drop (17) which is hydrophobic to the surface of an object (14) to be measured is dropped on the surface of the object and moved so as to be brought into contact with the overall surface of the object to be measured. After the movement, the drop is recovered and analyzed by chemical analysis to measured the kind of element and content of an impurity adsorbed on the surface of the object to be measured.</p> |
| 申请公布号 |
EP0339463(A2) |
申请公布日期 |
1989.11.02 |
| 申请号 |
EP19890107038 |
申请日期 |
1989.04.19 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MAEDA, AYAKO C/O INTELLECTUAL PROPERTY DIVISION;KAGEYAMA, MOKUJI INTELLECTUAL PROPERTY DIVISION;YOSHII, SHINTARO INTELLECTUAL PROPERTY DIVISION;OGINO, MASANOBU INTELLECTUAL PROPERTY DIVISION |
| 分类号 |
G01N1/28;G01N1/02;G01N31/00;G01N33/00 |
主分类号 |
G01N1/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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