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发明名称
LSI MASK PATTERN LAYOUT SYSTEM BY SHRINK CELL
摘要
申请公布号
JPH01273178(A)
申请公布日期
1989.11.01
申请号
JP19880101716
申请日期
1988.04.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
MIWA HISAHARU
分类号
H01L21/822;G06F17/50;H01L21/82;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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