| 摘要 |
PURPOSE:To scan a laser beam on a photomask in which liquid crystal whose light transmittance characteristics vary is provided, eliminate light transmittable area and obtain a good pattern shape by heating between transparent substrates. CONSTITUTION:Light from a light source 22 becomes parallel light by a capacitor lens 24, selectively permeates a photomask 46 having a fixed shape pattern, reduced down to fixed magnification by a reducing lens 32 and exposes a piece of photosensitive resin 30 formed on a specimen 28. A laser device 12 selectively heats the mask 46. A scanning means (X scanner 14, Y scanner 16, relay lens 18, ftheta lens 20) scans a laser beam produced by the device 12 on the surface of the mask 46. When the laser beam is irradiated on the mask 46, the laser beam is absorbed by a light absorbing layer 38. The absorbing layer 38 generates heat and a liquid crystal 42 is transparent because its molecules align in order, and is heated until it becomes an isotropic liquid crystal phase. Thereby, a good pattern shape can be obtained. |
