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发明名称
LIGHT QUANTITY ADJUSTOR
摘要
申请公布号
JPH01274020(A)
申请公布日期
1989.11.01
申请号
JP19880102680
申请日期
1988.04.27
申请人
NIKON CORP
发明人
TANIMOTO SHOICHI;SUZUKI KAZUAKI
分类号
G01J1/42;G03F7/20;H01L21/027;H01L21/30
主分类号
G01J1/42
代理机构
代理人
主权项
地址
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