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发明名称
LENGTH MEASURING APPARATUS
摘要
申请公布号
JPH01274001(A)
申请公布日期
1989.11.01
申请号
JP19880102684
申请日期
1988.04.27
申请人
NIKON CORP
发明人
TANIGUCHI TETSUO
分类号
G01B9/02;G03F9/00;H01S3/00
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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