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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPH01273322(A)
申请公布日期
1989.11.01
申请号
JP19880101891
申请日期
1988.04.25
申请人
SHARP CORP
发明人
MIKAMI AKIYOSHI;TANAKA KOICHI;TANIGUCHI KOJI;YOSHIDA MASARU;NAKAJIMA SHIGEO
分类号
H01L21/205;H01L21/365
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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