| 摘要 |
PURPOSE:To eliminate vibrations from the outside, marring of tubular dielectrics due to external forces, the generation of damages and the variety of discharge and to contrive the stabilization of output by a method wherein annular members consisting of elastic material are closely arranged between the tubular dielectrics and metal electrodes. CONSTITUTION:Annular members 22 and 23 all consist of an elastic material, which is superior in a high frequency resistance and a high temperature resistance and consist of fluorine or a silicone rubber or the like, for example, are formed into the configuration of an O-ring and are pressed to the outer faces of tubular dielectrics 21 by metal electrodes 24 and 25 making a pair in combination with the upper and lower ones. Laser gas is circulated in the inner sides of the dielectrics 21 and silent discharge 34 is performed through the dielectrics 21 between the electrodes 24 and 25 to induce the laser gas. The members 22 and 23 are put in a high-frequency electric field and keep coming into contact to the high-temperature dielectrics 21, but as the members 22 and 23 consist of the high frequency-resistant and high temperature-resistant material, vibrations from the outside and external forces are also absorbed by the elasticity of the members 22 and 23, marring due to the dielectrics and the generation of cracks and failures are prevented and each spaces between the dielectrics 21 and the electrodes 24 and 25 is filled with the members 22 and 23. Thereby, as the generation of spaces is avoided, the variation of the silent discharge 34 is eliminated. |
