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发明名称
Flow controller
摘要
申请公布号
US4877051(A)
申请公布日期
1989.10.31
申请号
US19880277030
申请日期
1988.11.28
申请人
MKS INSTRUMENTS, INC.
发明人
DAY, CHRISTOPHER C.
分类号
G05D7/06
主分类号
G05D7/06
代理机构
代理人
主权项
地址
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