DRY ASHING APPARATUS,申请号JP19880100265-传众专利搜索

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发明名称	DRY ASHING APPARATUS
摘要
申请公布号	JPH01272120(A)	申请公布日期	1989.10.31
申请号	JP19880100265	申请日期	1988.04.25
申请人	HITACHI LTD	发明人	INADA AKIISA;TAKANASHI AKIHIRO;KAWASUMI KENICHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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