| 摘要 |
PURPOSE:To hold a cleaning solvent clean by providing a wire gauge in a distilling column constituting a solvent reproduction part and providing a storage tank between a cleaning part and the solvent reproduction part. CONSTITUTION:Oil, dust, dirt, and other particulates removed from the substrate by cleaning while suspended in a solvent are discharged from a vapor cleaning tank 13 and a boiling cleaning tank and gathered in the storage tank 31. Then, they are sent to the distilling tank 2 of the distilling column 1 and the major portion of them is separated by distilling, but particulates which move up together with solvent vapor without being separated are removed when passing through wire gauges 5a-5c arranged at a solvent vapor passing part. The solvent which is liquefied and reproduced at the condensation part 3 of the distilling column 1 is sent back to both a 2nd ultrasonic cleaning tank 12 and the vapor cleaning tank 13, and a contaminated solvent is discharged from a 1st ultrasonic wave cleaning tank 11 and the vapor cleaning tank 13 and gathered in the storage tank. Consequently, the solvent is not concentrated in the cleaning tank with dust, dirt, and other particulates and the high degree of cleanness is held at all times. |
