| 摘要 |
PURPOSE:To simply perform the detachment of a heater and to make the maintenance of a device efficient by constituting so that an electroheating heater is inserted from the side wall plate of a liquid tank part via a protection pipe into the inert liquid of a vapor tank. CONSTITUTION:An electroheating heater 38 is inserted from the side wall plate 32a of a liquid tank part 32 via a protection pipe 102 into the inert liquid 37 stored at the bottom part of a vapor tank 31. A flange part 103 is integrally provided at the outer end side of the protection pipe 102 and fixed to the side wall plate 32a. The detachment of the heater can easily be done, so the maintenance of a device can be made efficient. |
