| 摘要 |
PURPOSE:To control fine movements of two shafts as completely independent systems by providing piezoelectric drivers in two perpendicular axial directions, and correcting the influence of displacement due to other drivers from the drivers independently. CONSTITUTION:Piezoelectric drivers 13, 14 are provided in two perpendicular axial directions of a driving member 10. The individual drivers 13, 14 are driven independently by the outputs of X-direction driving voltage generator 17 and Y-direction driving voltage generator 18 in two directions. The generators 17, 18 are connected by a correcting circuit 21 to correct the influence of the displacement due to other drivers at the time of driving one driver. |
