| 摘要 |
PURPOSE:To obtain in a short time in high reproducibility the title uniform glass film excellent in processability, handleability, etc., by simultaneously carrying out surface reaction and gaseous reaction using a combination of respective raw materials for said reactions. CONSTITUTION:(A) A raw material for surface reaction, incapable of grain growth (e.g., a mixed gas comprising SiH4, O2 and Ar), (B) a second raw material for gaseous reaction, capable of grain growth by gaseous reaction (e.g., a mixed gas comprising SiCl3, H2 and O2), and (C) an inert gas (e.g., Ar) for separating said two raw materials from each other are fed to a burner 31. Thence, fine particles are formed by the gaseous reaction of the raw material B, and allowed to impinge, together with the raw material A, on a substrate 32 to cumulate fine particles on said substrate 32 along with the surface reaction of the raw material A on the fine particles cumulated to grow a solid matter, thus forming porous layer consisting of this solid matter and said fine particles followed by high-temperature sintering to make this layer transparent, thereby obtaining the objective glass film for optical circuits. |
